Senior Field Service Engineer (Vacuum Chamber & Etch Tool)

Job Description

1. Install and commission etch chambers at customer wafer fabs in Penang, including equipment positioning, vacuum piping connection, helium leak testing, and system startup.
2. Perform preventive maintenance (PM), including complete chamber disassembly and reassembly. Replace key consumables such as:
3. Ceramic liners
4. Showerheads
5. Focus rings
6. OFHC copper seals
7. ESC helium cooling lines
8. Troubleshoot and repair chamber issues including:
9. Vacuum instability
10. Flange and bellows leaks
11. RF plasma arcing
12. Electrostatic chuck (ESC) helium back-cooling pressure issues
13. Temperature control deviations
14. Turbo molecular pump failures
15. Implement HQ-issued Engineering Change Orders (ECO), optimize vacuum control parameters, improve sealing processes, and reduce recurring failures.
16. Prepare equipment service reports and chamber failure trend reports in English, while providing field feedback to R&D regarding design improvements.
17. Participate in a 24/7 on-call rotation , responding to unplanned production downtime within one hour and supporting customer sites across Malaysia when required.

Job Requirements

1. Education
2. Bachelor's degree in Mechanical, Mechatronics, Electronic Engineering, or related disciplines.
3. Bachelor's degree with 5+ years of semiconductor etch equipment field service experience.
4. Master's degree with 3+ years of relevant experience.
5. Technical Skills
6. Ability to read vacuum system schematics, chamber exploded drawings, and PID control diagrams.
7. Skilled in operating helium leak detectors and vacuum calibration equipment.
8. Hands-on experience servicing Lam Research Kiyo/Versys process chambers and performing segmented vacuum leak detection.
9. Working Conditions
10. Able to work long-term in Class 100/Class 1000 cleanroom environments.
11. Willing to work rotating shifts, night standby, and travel across states.
12. Familiar with the 8D problem-solving methodology .
13. Language
14. Able to read technical manuals and communicate effectively in English with customers and global technical teams.