Design the complete structure, sealing modules, thermal control system, and gas distribution system for Kiyo/Versys series etch vacuum chambers using Creo/NX UG , including 3D modeling, detailed drawings, and complete BOM preparation.
Perform multiphysics finite element analysis (FEA) using NX Nastran and COMSOL , including thermal stress analysis, vacuum structural strength analysis, internal gas flow simulation, and plasma thermal distribution to optimize temperature control and gas flow uniformity.
Select suitable chamber materials and metal sealing solutions for halogen plasma corrosion environments. Prepare vacuum chamber engineering specifications, assembly torque procedures, and manufacturing drawings in compliance with SEMI standards .
Lead prototype validation, including helium leak testing, ultimate vacuum performance testing, and thermal cycling reliability testing. Identify design issues such as vacuum leakage and temperature non-uniformity, and implement design improvements.
Coordinate with HQ R&D teams and local CNC precision machining suppliers in Penang to support prototype fabrication, Engineering Change Orders (ECO), and production issue resolution.
Collect long-term field failure data, prepare failure analysis reports, and continuously improve chamber structural designs to enhance product reliability and lifetime.
Job Requirements
Education
Bachelor's degree or above in Mechanical Engineering, Vacuum Engineering, Precision Manufacturing, or related fields.
Bachelor's degree with 5+ years of UHV vacuum chamber design experience for semiconductor etch equipment.
Master's degree with 3+ years of related R&D experience.
PhD candidates with advanced process chamber development experience are preferred.
Software Skills
Proficient in Creo, NX, or SolidWorks.
Experienced in NX Nastran and COMSOL for multiphysics simulation.
Strong knowledge of GD&T engineering drawing standards.
Technical Expertise
In-depth knowledge of Ultra High Vacuum (UHV, 10 Torr) systems.
Metal sealing technologies.
Helium mass spectrometer leak detection.
Plasma chamber thermal management.
PID temperature control systems.
Corrosion-resistant material selection.
Vacuum components including dry pumps, turbo molecular pumps, gate valves, and bellows.
Industry Experience
Proven experience in semiconductor etch or deposition chamber development.
Experience with Lam Research, Applied Materials (AMAT), or Tokyo Electron (TEL) is highly preferred.
Language & Soft Skills
Fluent technical English.
Able to read engineering drawings, prepare technical reports, and participate in global technical meetings.
Strong cross-functional collaboration and problem-solving skills.
