spare parts planning, semiconductor manufacturing equipment, Root Cause Analysis, sputtering equipment, Control Systems, maintenance practices, thin-film deposition systems, maintenance optimization, advanced troubleshooting, high-vacuum technology, vacuum systems, equipment reliability, plasma processes

Preventive Maintenance, vacuum systems, Control Systems, Equipment inspections, Troubleshooting, Equipment recovery, Thin-film deposition systems, Diagnostic tools, Multimeters, Machine upgrades, Oscilloscopes, High-vacuum technology, System modifications, Corrective maintenance, Sputter equipment, Plasma processes